氮气流量及后续热处理对多弧离子镀制备Ti<sub>2</sub>AlN涂层的影响规律

中国腐蚀与防护学报

2012, Vol. 32

Issue (1): 1-6

研究报告

本期目录 | 过刊浏览

氮气流量及后续热处理对多弧离子镀制备Ti₂AlN涂层的影响规律

杨英¹,董瑜亮¹,高立军¹,宫骏¹,姜辛²,孙超¹

1. 中国科学院金属研究所金属腐蚀与防护国家重点实验室沈阳 110016
2. 德国锡根大学材料研究所锡根 57076

EFFECTS OF NITROGEN FLOW RATE AND POST-HEAT TREATMENT ON PREPARATION OF Ti₂AlN COATINGS BY AIP

YANG Ying¹, DONG Yuliang¹, GAO Lijun¹, GONG Jun¹, JIANG Xin², SUN Chao¹

1. State Key Laboratory for Corrosion and Protection, Institute of Metal Research, Chinese Academy of Sciences, Shenyang 110016
2. Institute of Materials Engineering, University of Siegen, Paul-Bonatz-Str.9-11, Siegen 57076, Germany

全文: PDF(1016 KB)

摘要: 利用电弧离子镀技术在1Cr18Ni9Ti基材上低温沉积Ti-Al-N涂层，研究氮气流量及热处理工艺对涂层微观组织结构的影响。结果表明，沉积态涂层中不含三元层状陶瓷Ti₂AlN MAX相，可能含有Ti₃AlN（反钙钛矿结构）、TiN、α-Ti、fcc-Al及Ti_xAl_y金属间化合物等。涂层经退火后在一定条件下可以形成Ti₂AlN。涂层中的N元素含量及退火温度对Ti₂AlN的形成起到重要作用。N元素含量过多不利于Ti₂AlN的形成；提高退火温度可以促进Ti₂AlN的形成。透射电镜（TEM）分析结果表明，退火过程中Ti₂AlN的形成伴随着涂层微观组织结构的转变，从明显的层状结构转变为细小的等轴晶结构。

关键词 ：电弧离子镀, Ti-Al-N涂层, Ti₂AlN, MAX相, 微观结构

Abstract：In the present work, Ti-Al-N coatings were deposited on 1Cr18Ni9Ti substrates at a low synthesis temperature using arc ion plating(AIP). The effects of nitrogen flow rate and post-heat treatment on the microstructure of the coatings were investigated. The results show that no Ti₂AlN phase forms in all the as-deposited coatings. The coatings are possibly composed of Ti₃AlN inverse perovskite phase, TiN, α-Ti, fcc-Al and Ti_xAl_y intermetallic phase. Ti₂AlN phase can be detected in the annealed coatings in a given condition. It has been found that the nitrogen concentration in the coatings and the annealing temperature play a key role in the phase formation. The formation of Ti₂AlN phase is suppressed by the increment of nitrogen concentration and promoted by the enhancement of annealing temperature. TEM results indicate that the formation of Ti₂AlN phase is accompanied by the microstructure evolution from strong layered structure to fine equiaxed crystals in the process of heat treatment.

Key words： arc ion plating Ti-Al-N coatings Ti₂AlN MAX phase microstructure

收稿日期: 2010-11-04

ZTFLH:

TG178

通讯作者: 孙超 E-mail: csun@imr.ac.cn

Corresponding author: SUN Chao E-mail: csun@imr.ac.cn

作者简介: 杨英，女，1983年生，博士生，研究方向为硬质涂层的微观结构与力学性能

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杨英,董瑜亮,高立军,宫骏,姜辛,孙超. 氮气流量及后续热处理对多弧离子镀制备Ti₂AlN涂层的影响规律[J]. 中国腐蚀与防护学报, 2012, 32(1): 1-6.
XUN Tiao, YANG Yang. EFFECTS OF NITROGEN FLOW RATE AND POST-HEAT TREATMENT ON PREPARATION OF Ti₂AlN COATINGS BY AIP. J Chin Soc Corr Pro, 2012, 32(1): 1-6.

链接本文:

https://www.jcscp.org/CN/ 或 https://www.jcscp.org/CN/Y2012/V32/I1/1

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