多弧离子镀(Ti, Al, Zr, Cr) N多元膜的高温氧化行为

中国腐蚀与防护学报

2009, Vol. 29

Issue (4): 296-300

研究报告

本期目录 | 过刊浏览

多弧离子镀(Ti, Al, Zr, Cr) N多元膜的高温氧化行为

赵时璐^1;2;张钧^1;2;刘常升¹

1.东北大学材料与冶金学院材料各向异性与织构工程教育部重点实验室沈阳110004
2.沈阳大学机械工程学院沈阳 110044

HIGH TEMPERATURE OXIDATION BEHAVIOR OF MULTI-COMPONENT (Ti, Al, Zr,Cr) N FILMS\par DEPOSITED BY MULTI-ARC ION PLATING

ZHAO Shilu^1;2;ZHANG Jun^1;2; LIU Changsheng¹

1. Key Laboratory for Anisotropy and Texture of Materials; Ministry of Education; School of Materials and Metallurgy;Northeastern University; Shenyang 110004
2. School of Mechanism Engineering; Shenyang University; Shenyang 110044

全文: PDF(2008 KB)

摘要:

采用多弧离子镀技术，用Ti-Al-Zr合金靶和Cr靶，在 W18Cr4V高速钢基体上沉积了(Ti, Al, Zr,\linebreak Cr)N多元膜，并进行了600 ℃，700 ℃，800 ℃和900 ℃短时(4 h)高温氧化实验及 700 ℃和800 ℃长期(100 h) 高温循环氧化实验。用扫描电镜 (SEM)、能谱(EDS)和X射线衍射(XRD)观察和分析样品表面氧化膜。结果表明，这种多元膜在短时(4 h)高温氧化条件下，800 ℃时仍具有良好的抗高温氧化性，XRD显示氧化膜主要为TiO₂；在长期(100 h)高温氧化条件下，该多元膜的抗高温氧化温度大约为700 ℃左右

关键词 ：多弧离子镀(Ti, Al, Zr, Cr), N膜, 高速钢, 高温氧化

Abstract：

Using Ti-Al-Zr target and pure Cr target, the multi-component nitride films, (Ti, Al, Zr, Cr) N, were deposited on the substrates of high speed steel (W18Cr4V) by multi-arc ion plating technique. The high temperature oxidation of the film was carried out in the case of both the short-time (600 ℃, 700 ℃, 800 ℃ and 900 ℃ for 4 h) and long-time (700 ℃ and 800 ℃ for 100 h) tests. All of the specimens were characterized by scanning electron microscopy (SEM), energy dispersion X-ray spectroscopy (EDS) and X-ray diffraction (XRD). It was shown that the high temperature oxidation resistance of the film was up to 800 ℃ in case of short-time oxidation, and TiO₂ formed on the (Ti, Al, Zr, Cr) N film; while oxidation resistance of the film was up to 700 ℃\linebreak in case of long-time oxidation.

Key words： multi-arc ion plating (Ti, Al, Zr, Cr) N film high speed steel high temperature oxidation resistance

收稿日期: 2009-03-17

ZTFLH:

TG174

通讯作者: 赵时璐 E-mail: zhaoshilu@sina.com

Corresponding author: ZHAO Shi-Lu E-mail: zhaoshilu@sina.com

	服务

	把本文推荐给朋友
	加入引用管理器
	E-mail Alert
	RSS
	作者相关文章
	赵时璐
44.8K

引用本文:

赵时璐张钧刘常升. 多弧离子镀(Ti, Al, Zr, Cr) N多元膜的高温氧化行为[J]. 中国腐蚀与防护学报, 2009, 29(4): 296-300.
DIAO Shi-Lu. HIGH TEMPERATURE OXIDATION BEHAVIOR OF MULTI-COMPONENT (Ti, Al, Zr,Cr) N FILMS\par DEPOSITED BY MULTI-ARC ION PLATING. J Chin Soc Corr Pro, 2009, 29(4): 296-300.

链接本文:

https://www.jcscp.org/CN/ 或 https://www.jcscp.org/CN/Y2009/V29/I4/296

[1] Sathrum P, Coll B F. Plasma and deposition enhancement by modified arc evaporation source[J]. Surf. Coat. Technol.,1992, 50(2): 103-109
[2] Vetter J. Vacuum arc coatings for tools:potential and application[J]. Surf. Coat. Technol., 1995, 76-77:719-724
[3] Mitsuo A, Uchida S, Nihira N, et al. Improvement of high-temperature oxidation resistance of titanium nitride and titanium carbide films by aluminum ion implantation[J]. Surf.Coat. Technol., 1998, 103/104: 98-103
[4] Ma S L, Xu J, Jie W Q,et al. Characterization of microstructure and hardness of PCVD deposited Ti_1-xA_lx N hard coatings[J]. Acta Metall. Sin.,2004, 40(6): 669-672
    (马胜利, 徐健, 介万奇等. PCVD制备Ti1-xAlxN硬质薄膜的结构与硬度[J]. 金属学报, 2004, 40(6): 669-672)
[5] Lu Y H, Shen Y G, Zhou Z F, et al. Effects of nitrogen content on microstructure and oxidation behaviors of Ti-B-N nanocomposite thin films[J]. J. Vaccum Sci. Technol., 2006, 24A (2):340-349
[6] Zhao S L, Li Y, Zhang J, et al. Research progress of nitride coatings on tools[J]. Heat Treat. Met., 2008, 33(9): 99-104
    (赵时璐, 李友, 张钧等. 刀具氮化物涂层的研究进展[J].金属热处理, 2008, 33(9): 99-104)
[7] Xie Z W, Bai X J, Meng J L, et al. Oxidation behavior of (Ti Fe Cr) N multi-component films[J].Chin. J. Nonferrous Met., 2001,11(6): 1064-1068
    (谢致薇, 白晓军, 蒙继龙等. (Ti Fe Cr)N多元膜的氧化行为[J]. 中国有色金属学报, 2001, 11(6): 1064-1068)
[8] Raveh A, Weiss M, Shneck R. Optical emission spectroscopy as a tool for designing and controlling the deposition of graded (Ti Al) N layers by ECR-assisted reactive RF sputtering[J]. Surf. Coatings Technol., 1999, 111: 263-268
[9] Mitsuo A, Uchida S, Nihira N, et al. Improvement of high-temperature oxidation resistance of titanium nitride and titanium carbide films by aluminum ion implantation[J].Surf. Coat. Technol., 1998, 103/104: 98-103
[10] Shum P W, Li K Y, Zhou Z F, et al. Structural and mechanical properties of titanium-aluminium-nitride films deposited by reactive close-field unbalanced magnetron sputtering[J]. Surf. Coat. Technol., 2004,185(2-3): 245-253
[11] Luo Q, Rainforth W M, Munz W D. Wear mechanisms of monolithic and multi-component nitride coatings grown by combined arc etching and unbalanced magnetron sputtering[J].Surf. Coat. Technol., 2001, 146-147: 430-435
[12] Zhang J, Li L,Zhang L P, et al. Composition demixing effect on cathodic arc ion plating[J]. J. Univ. Sci. Technol. Beijing, 2006, 13(2):125-130
[13] Zhang J, Zhang Y, Li L, et al. Approximate design of alloy composition of cathode target[J]. J. Mater. Sci. Technol., 2006,22(5): 639-642

[1]	郑艳欣, 刘颖, 宋青松, 郑峰, 贾玉川, 韩培德. 含铁铜基陶瓷复合材料高温氧化行为与耐磨性研究[J]. 中国腐蚀与防护学报, 2020, 40(2): 191-198.
[2]	徐勋虎,何翠群,向军淮,王玲,张洪华,郑晓冬. Co-20Re-25Cr-1Si合金在0.1 MPa纯O₂中的高温氧化行为[J]. 中国腐蚀与防护学报, 2020, 40(1): 75-80.
[3]	王泽臣, 林君, 杨国卿, 梁尚清. 全氟磺酸膜对海洋电场电极抗腐蚀与电场响应性能影响的研究[J]. 中国腐蚀与防护学报, 2019, 39(6): 581-587.
[4]	夏俊捷,牛红志,刘敏,曹华珍,郑国渠,伍廉奎. 基于卤素效应的阳极氧化技术提高Ti48Al5Nb合金抗高温氧化性能[J]. 中国腐蚀与防护学报, 2019, 39(2): 96-105.
[5]	谢冬柏,周游宇,鲁金涛,王文,朱圣龙,王福会. Al/Si对镍基合金在超临界水中腐蚀行为的影响[J]. 中国腐蚀与防护学报, 2019, 39(1): 68-76.
[6]	王玲,向军淮,张洪华,覃宋林. 3种不同Cr含量Co-20Re-Cr合金在1000和1100 ℃的高温氧化行为[J]. 中国腐蚀与防护学报, 2019, 39(1): 83-88.
[7]	谢冬柏, 周游宇, 鲁金涛, 王文, 朱圣龙, 王福会. Cr对镍基合金在超临界水中氧化行为的影响研究[J]. 中国腐蚀与防护学报, 2018, 38(4): 358-364.
[8]	李越, 王剑, 张勇, 白晋钢, 胡亚迪, 乔永锋, 张彩丽, 韩培德. 2205双相不锈钢密闭容器中高温初始氧化过程分析[J]. 中国腐蚀与防护学报, 2018, 38(3): 296-302.
[9]	孙超, 杨潇, 文玉华. 表面溅射高含铝奥氏体不锈钢合金涂层对316不锈钢抗高温氧化性能的影响[J]. 中国腐蚀与防护学报, 2017, 37(6): 590-596.
[10]	赵展,李景阳,董建新,姚志浩,张麦仓. 925镍铁基耐蚀合金均匀化及高温氧化行为[J]. 中国腐蚀与防护学报, 2017, 37(1): 1-8.
[11]	王喜忠,吴建颢,彭徽,郭洪波,宫声凯. 电子束物理气相沉积La₂Ce₂O₇热障涂层的高温燃气热腐蚀行为研究[J]. 中国腐蚀与防护学报, 2017, 37(1): 36-40.
[12]	谢冬柏,单国. 燃油火场环境中助燃剂的快速检验方法研究[J]. 中国腐蚀与防护学报, 2017, 37(1): 74-80.
[13]	杨甜甜,徐敬军,钱余海,李美栓. 石墨基体上ZrC/MoSi₂微叠层涂层的制备及抗超高温氧化性能[J]. 中国腐蚀与防护学报, 2016, 36(5): 476-482.
[14]	黄嘉鹏,杨斌,汪航. 稀土 (Y,La,Ce) 复合添加对Ni-10Cr-5Al合金在1000 ℃下高温氧化行为的影响[J]. 中国腐蚀与防护学报, 2016, 36(5): 489-496.
[15]	袁军涛, 王文, 朱圣龙, 王福会. Super 304H钢在700~900 ℃纯水蒸汽中的氧化行为[J]. 中国腐蚀与防护学报, 2014, 34(3): 218-224.

Viewed

Full text

Abstract

Cited

Shared

Discussed