表面膜椭圆法理论曲线的计算

中国腐蚀与防护学报

1982, Vol. 2

Issue (2): 48-58

研究报告

本期目录 | 过刊浏览

表面膜椭圆法理论曲线的计算

邱富荣;刘执平;丁雪娣

中国科学院福建物质结构研究所;中国科学院福建物质结构研究所;中国科学院福建物质结构研究所

COMPUTATION OF ELLIPSOMETRIC THEORETICAL CURVES OF SURFACE FILMS

Qiu Furong Liu Zhiping and Ding Xuedi(Fujien Materials Structure Research Institute; Academia Sinica)

全文: PDF(839 KB)

摘要: 本文对椭圆法的一系列计算公式进行数学处理,编制了能用微型计算机获得吸收膜理论曲线参数的BASIC程序。该程序适用于金属表面膜、半导体表面膜的计算,可得到不同入射角、不同介质、不同基体上膜的Ψ—△曲线。本工作使用微型计算机和BASIC语言,易为非计算技术专业工作者掌握应用。文中列出了程序,并给出了某些计算结果。

Abstract：Equations of ellipsometry were mathematically treated. A BASIC program for use with microcomputer for computing ellipsometric theoretical curves of adsorption film on solid state, with various angles of incidence of polarised light and various media, was worked out. The program is given together with some computing results.

收稿日期: 1982-04-25

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引用本文:

邱富荣;刘执平;丁雪娣. 表面膜椭圆法理论曲线的计算[J]. 中国腐蚀与防护学报, 1982, 2(2): 48-58.
. COMPUTATION OF ELLIPSOMETRIC THEORETICAL CURVES OF SURFACE FILMS. J Chin Soc Corr Pro, 1982, 2(2): 48-58.

链接本文:

https://www.jcscp.org/CN/ 或 https://www.jcscp.org/CN/Y1982/V2/I2/48

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[7] 母国光、战元令编,光学(1979)
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[9] G. M. Bulman and A. C. C. Tseung, An ellipsometric study of passive film growth on stainless steel, Corrosion Science, 13, 7, 531 (1973)
[10] Z.Szklarska-Smialowska and N. Lukomski, Ellipsometric Study of Surface Films Grown on Austenitic Stainless Steel in Chloride Solution, Corrosion, 34, 5, 117 (1978)
[11] 邱富荣、史礼义,椭圆偏光法研究低碳钢在碳铵溶液中的阳极钝化行为(1980)
[12] Level Ⅱ BASIC Reference Mannal, Radio Shack, a division of Tandy Corporation (1980)

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