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Abstract The effects of non-aggressive anions Mp (NO_3~(2-), CrO_4~(2-), SO_4~(2-))in sodium chloride solution on the critical pitting potential E_c of a thin aluminum film in integrated circuit were studied. It was found that these ions shifted E_c to more noble values and, up to a given concentration of chloride, E_C and [Mp], followed the relation: E_c=a+blog[Mp]. From the preceding relations for several concentration of chlorides, an equation log[Cl~-]=Alog [Mp] +B was obtained. The efficiency of inhibition decreased in the order: NO_3~->CrO_4~(2-)》SO_4~(2-). It was supposed that the cause of inhibition was the reversible competitive adsorption of non-aggressive anions with chloride ion, and the difference of inhibition efficiency depended mostly on the oxidation ability of these anions.
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Received: 25 August 1988
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