AN ELLIPSOMETRIC STUDY OF THE FORMATION OF TWO-LAYER THIN FILM

J Chin Soc Corr Pro

1987, Vol. 7

Issue (4): 239-248 DOI:

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AN ELLIPSOMETRIC STUDY OF THE FORMATION OF TWO-LAYER THIN FILM

Zhou Qingchu Xu Naixin Shih Shengtai (Shanghai Institute of Metallurgy; Academia Sinica)

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Abstract Layer structure and thickness of two-layer homogeneous thin film can be investigated by ellipsometric measurements starting from the film-free surface. A break observed on the experimental δΔ-δφ loci seems to suggest the presence of two layers on the substrate. The Drude equation modified for the two-layer film was presented. To determine the film growth and optical constants of the individual layers, the best fit approach was used between calculated Δ_c, φ_c for the proposed complex refractive indexes and the experimental ellipsometric data. Obviously, the second layer may be for reed either as inner layer or as outer layer related to the initially formed layer. These two possible mechanisms of film formation can be judged with ellipsometric computation. Examples of computation were given of passive films on cobalt as well as on stainless steel.

Received: 25 August 1987

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Zhou Qingchu Xu Naixin Shih Shengtai (Shanghai Institute of Metallurgy; Academia Sinica). AN ELLIPSOMETRIC STUDY OF THE FORMATION OF TWO-LAYER THIN FILM. J Chin Soc Corr Pro, 1987, 7(4): 239-248.

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https://www.jcscp.org/EN/ OR https://www.jcscp.org/EN/Y1987/V7/I4/239

[1] 原信羲;杉本克久;沢田可信,日本金属学会志,40,1304(1976)
[2] Kudo, K.; Sato, N.; Ohtsuka, T., Passivity of Metals, Ed. Frankenthal, R. P.; Kruger, J., The Electrochem. Soc., Princeton, NJ(1978) , P.918
[3] Ohtsuka. T.; Sate, N., J. Electrochem. Soc., 128, 2522(1981)
[4] 徐乃欣;周庆初,中国科学院上海冶金研究所,科技通讯,4,23(1986)
[5] 周庆初;徐乃欣;石声泰,光学工程,6,31(1986)
[6] 周庆初;徐乃欣;石声泰,中国腐蚀与防护学报,6(4) ,255(1986)
[7] Samuel, S. So, Surf. Sci., 56, 97 (1976)
[8] Dell's Oca, C. J.; Young, L., Surf. Sci., 16, 331 (1969)
[9] Heavens, O. S., Optics Properties of Thin Solid Films, Butterworths, London, P51, (1955)
[10] Azzam, R. M. A; Bashara, N. M., Ellipsometry and Polarized Light, North-Holand Pub. Co., New York, (1977)

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