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COMPUTATION OF ELLIPSOMETRIC THEORETICAL CURVES OF SURFACE FILMS |
Qiu Furong Liu Zhiping and Ding Xuedi(Fujien Materials Structure Research Institute; Academia Sinica) |
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Abstract Equations of ellipsometry were mathematically treated. A BASIC program for use with microcomputer for computing ellipsometric theoretical curves of adsorption film on solid state, with various angles of incidence of polarised light and various media, was worked out. The program is given together with some computing results.
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Received: 25 April 1982
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[1] W. E. J. Neal, Optical examination and monitoring of surfaces, Application of Surface Science, 2, 4, 445(1979) [2] D. T. Larson, Surface analytic technigues in corrosion science, Corrosion Science, 19, 10, 657(1979) [3] F. L. McCrackin and J. Colson, A FORTRAN program for analysis of ellipsometer measurements and calculation of reflection coefficients from thin films, NBS Tech. Note 242 (1964) [4] F. L. McCrackin, A FORTRAN program for analysis of ellipsometer measurements, Tech, Note 479, NBS, Wasington D.C(1969) [5] 一机部自动化所,单层介质列线图,1981年椭园测量学术会议资料 [6] 西安交通大学,椭园度仪测量硅片上薄膜厚度及折射率(1974) [7] 母国光、战元令编,光学(1979) [8] 重庆大学物理化学教研室,椭园法在金属腐蚀研究中的应用(1979) [9] G. M. Bulman and A. C. C. Tseung, An ellipsometric study of passive film growth on stainless steel, Corrosion Science, 13, 7, 531 (1973) [10] Z.Szklarska-Smialowska and N. Lukomski, Ellipsometric Study of Surface Films Grown on Austenitic Stainless Steel in Chloride Solution, Corrosion, 34, 5, 117 (1978) [11] 邱富荣、史礼义,椭圆偏光法研究低碳钢在碳铵溶液中的阳极钝化行为(1980) [12] Level Ⅱ BASIC Reference Mannal, Radio Shack, a division of Tandy Corporation (1980) |
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