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中国腐蚀与防护学报  2009, Vol. 29 Issue (2): 104-108    
  研究报告 本期目录 | 过刊浏览 |
图案化限域铝阳极氧化方法研究
韩喻1;谢凯2
国防科学技术大学材料工程与应用化学系 长沙 410073
ELECTROCHEMICALLY PREPARED PATTERN\par OF ANODIC ALUMINA
HAN Yu; XIE Kai
Department of Materials Engineering and Applied Chemistry;National University of Defense Technology;Changsha 410073
全文: PDF(1233 KB)  
摘要: 

将软刻蚀技术与电化学阳极氧化相结合,提出了图案化限域铝阳极氧化方法。摸索出图案化限域的关键工艺条件,认为聚合过程中单体挥发产生的空隙和链段热运动产生的空穴是影响聚合物膜层隔绝电解液性能的关键因素之一。同时需根据设计的图案尺寸选择适当的膜层厚度,在保证隔绝电解液性能以及粘流态聚合物能够完全覆盖非图案区的基础上,膜厚应小于毛细管力推动聚合物攀升的最高高度。

关键词 图案化限域阳极氧化铝聚苯乙烯    
Abstract

Soft lithography and anodic process were combined to prepare the pattern porous alumina successfully. The experiments showed that the spacing after monomer volatilizing during polymerization and the cavity produced by thermal motion of segment were the key factors to weaken the protection of film. In addition, the thickness of which should be thinner than the max height of polymer spread by the capillary force.

Key wordspattern;anodic alumina;polystyrene
收稿日期: 2007-07-24     
ZTFLH: 

O78

 
基金资助:

国家部委基金项目支持

通讯作者: 韩喻      E-mail: yumihan1981@yahoo.com.cn
Corresponding author: HAN Yu     E-mail: yumihan1981@yahoo.com.cn

引用本文:

韩喻 谢凯. 图案化限域铝阳极氧化方法研究[J]. 中国腐蚀与防护学报, 2009, 29(2): 104-108.
HAN Yu-, XIE Kai. ELECTROCHEMICALLY PREPARED PATTERN\par OF ANODIC ALUMINA. J Chin Soc Corr Pro, 2009, 29(2): 104-108.

链接本文:

https://www.jcscp.org/CN/      或      https://www.jcscp.org/CN/Y2009/V29/I2/104

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