N2 流量和靶基距对多弧离子镀沉积AlSiN纳米复合涂层的微观组织及耐腐蚀性能影响

李茂, 邓轲, 陈衍祥, 刘中豪, 李尚, 郭宇婷, 董选普, 曹华堂

Influence of N2 Flow and Target-substrate Distance on Microstructure and Corrosion Resistance Properties of Multi-arc Ion Plated AlSiN Nano-composite Coatings

LI Mao, DENG Ke, CHEN Yanxiang, LIU Zhonghao, LI Shang, GUO Yuting, DONG Xuanpu, CAO Huatang

表4 不同靶基距下AlSiN涂层的极化曲线数据

Table 4 Fitting parameters of polarization curves of AlSiN coatings deposited by AIP at different target-to-substrate distances

Item Icorr / 10-8 A·cm-2 Ecorr / V TC4 substrate 60.55 -0.39 340 mm 4.56 -0.42 260 mm 4.58 -0.38 180 mm 2.65 -0.35