N2 流量和靶基距对多弧离子镀沉积AlSiN纳米复合涂层的微观组织及耐腐蚀性能影响

N₂ 流量和靶基距对多弧离子镀沉积AlSiN纳米复合涂层的微观组织及耐腐蚀性能影响

李茂, 邓轲, 陈衍祥, 刘中豪, 李尚, 郭宇婷, 董选普, 曹华堂

Influence of N₂ Flow and Target-substrate Distance on Microstructure and Corrosion Resistance Properties of Multi-arc Ion Plated AlSiN Nano-composite Coatings

LI Mao, DENG Ke, CHEN Yanxiang, LIU Zhonghao, LI Shang, GUO Yuting, DONG Xuanpu, CAO Huatang

表5 不同靶基距下AlSiN涂层的等效电路拟合数据

Table 5 Fitting data of EIS of AlSiN coatings deposited by AIP at different target-substrate distances

Distance / mm	R_s / Ω·cm²	Q_c / μF·cm^-2	n_c	R_c / Ω·cm²	Q_dl / μF·cm^-2	n_dl	R_ct / Ω·cm²
180	29.153	2.168	0.75	998.41	0.899	0.74	4.413 × 10⁶
260	28.248	2.677	0.68	685.79	0.299	0.81	3.549 × 10⁶
340	15.75	4.359	0.74	630.05	1.842	0.72	2.301 × 10⁶