N2 流量和靶基距对多弧离子镀沉积AlSiN纳米复合涂层的微观组织及耐腐蚀性能影响

李茂, 邓轲, 陈衍祥, 刘中豪, 李尚, 郭宇婷, 董选普, 曹华堂

Influence of N2 Flow and Target-substrate Distance on Microstructure and Corrosion Resistance Properties of Multi-arc Ion Plated AlSiN Nano-composite Coatings

LI Mao, DENG Ke, CHEN Yanxiang, LIU Zhonghao, LI Shang, GUO Yuting, DONG Xuanpu, CAO Huatang

表3 不同氮气流量下所制备AlSiN涂层的等效电路拟合数据

Table 3 Fitting data of EIS of AlSiN coatings deposited by AIP at different N2 flow rates

N2 / L·min-1 Rs / Ω·cm2 Qc / μF·cm-2 nc Rc / Ω·cm2 Qdl / μF·cm-2 ndl Rct / Ω·cm2 0.05 29.649 2.181 0.68 1133.6 4.676 0.87 1.575 × 106 0.10 19.902 9.542 0.62 186.98 22.288 0.84 5.742 × 105 0.15 15.750 4.359 0.74 630.05 1.842 0.72 2.301 ×106 0.20 15.142 9.624 0.78 75.52 9.820 0.76 1.033 × 106