N2 流量和靶基距对多弧离子镀沉积AlSiN纳米复合涂层的微观组织及耐腐蚀性能影响

李茂, 邓轲, 陈衍祥, 刘中豪, 李尚, 郭宇婷, 董选普, 曹华堂

Influence of N2 Flow and Target-substrate Distance on Microstructure and Corrosion Resistance Properties of Multi-arc Ion Plated AlSiN Nano-composite Coatings

LI Mao, DENG Ke, CHEN Yanxiang, LIU Zhonghao, LI Shang, GUO Yuting, DONG Xuanpu, CAO Huatang

表2 不同氮气流量下AlSiN涂层的极化曲线数据

Table 2 Fitting parameters of polarization curves of AlSiN coatings deposited by AIP at different N2 flow rates

Item Icorr / 10-8 A·cm-2 Ecorr / V TC4 substrate 60.55 -0.39 0.05 L/min 8.30 -0.65 0.10 L/min 20.64 -0.47 0.15 L/min 4.56 -0.42 0.20 L/min 10.73 -0.42