N2 流量和靶基距对多弧离子镀沉积AlSiN纳米复合涂层的微观组织及耐腐蚀性能影响
李茂, 邓轲, 陈衍祥, 刘中豪, 李尚, 郭宇婷, 董选普, 曹华堂

Influence of N2 Flow and Target-substrate Distance on Microstructure and Corrosion Resistance Properties of Multi-arc Ion Plated AlSiN Nano-composite Coatings
LI Mao, DENG Ke, CHEN Yanxiang, LIU Zhonghao, LI Shang, GUO Yuting, DONG Xuanpu, CAO Huatang
图8 不同氮气流量下所制备AlSiN涂层的开路电位和极化曲线
Fig.8 Open circuit potentials (a) and polarization curves (b) of AlSiN coatings deposited by AIP at different N2 flow rates