N2 流量和靶基距对多弧离子镀沉积AlSiN纳米复合涂层的微观组织及耐腐蚀性能影响
Influence of N2 Flow and Target-substrate Distance on Microstructure and Corrosion Resistance Properties of Multi-arc Ion Plated AlSiN Nano-composite Coatings
N2 流量和靶基距对多弧离子镀沉积AlSiN纳米复合涂层的微观组织及耐腐蚀性能影响 |
| 李茂, 邓轲, 陈衍祥, 刘中豪, 李尚, 郭宇婷, 董选普, 曹华堂 |
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Influence of N2 Flow and Target-substrate Distance on Microstructure and Corrosion Resistance Properties of Multi-arc Ion Plated AlSiN Nano-composite Coatings |
| LI Mao, DENG Ke, CHEN Yanxiang, LIU Zhonghao, LI Shang, GUO Yuting, DONG Xuanpu, CAO Huatang |
| 图4 不同氮气流量和不同靶基距条件下所制备的AlSiN涂层元素组成 |
| Fig.4 Chemical compositions of AlSiN coatings deposited by AIP under the different conditions of N2 flow rate (a) and target-substrate distance (b) |
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