L-苹果酸和2,2'-联二吡啶对酒石酸钾钠体系低温化学镀铜的影响

朱皓, 程熠, 宋晅, 赵文霞, 李鑫巍, 刘欣, 回凯宏, 陈怀军, 翟世龙

Effect of L-malic Acid and 2,2'-bidipyridine on Electroless Copper Plating in Potassium Sodium Tartrate System at Low Temperature

ZHU Hao, CHENG Yi, SONG Xuan, ZHAO Wenxia, LI Xinwei, LIU Xin, HUI Kaihong, CHEN Huaijun, ZHAI Shilong

表2 L-苹果酸和2,2'-联二吡啶复合添加对沉积速率影响的极差分析

Table 2 Range analysis of the effect of L-malic acid and 2,2 '- bipyridine on the deposition rate

Additive K1 K2 K3 K4 k1 k2 k3 k4 R L-malic acid 17.8314 21.1555 19.7832 18.1950 4.4579 5.2888 4.9458 4.5487 0.8309 2,2'-bidipyridine 21.3622 19.0414 18.3682 18.1933 5.3406 4.7604 4.5921 4.5483 0.7923