L-苹果酸和2,2'-联二吡啶对酒石酸钾钠体系低温化学镀铜的影响

朱皓, 程熠, 宋晅, 赵文霞, 李鑫巍, 刘欣, 回凯宏, 陈怀军, 翟世龙

Effect of L-malic Acid and 2,2'-bidipyridine on Electroless Copper Plating in Potassium Sodium Tartrate System at Low Temperature

ZHU Hao, CHENG Yi, SONG Xuan, ZHAO Wenxia, LI Xinwei, LIU Xin, HUI Kaihong, CHEN Huaijun, ZHAI Shilong

表1 L-苹果酸和2,2'-联二吡啶复合添加对沉积速率影响的正交试验结果

Table 1 Orthogonal test results of the effect of L-malic acid and 2,2 '- bipyridine on deposition rate

Test number	Factor		Deposition rate µm·h^-1	Stability of solution
Test number	L-malic acid mg·L^-1	2,2'-bidipyridine mg·L^-1	Deposition rate µm·h^-1	Stability of solution
1	1	0.5	4.9921	Instability
2	1	1.0	4.4239	Stability
3	1	1.5	4.2146	Stability
4	1	2.0	4.2008	Stability
5	2	0.5	5.9775	Instability
6	2	1.0	5.2020	Stability
7	2	1.5	5.0115	Stability
8	2	2.0	4.9645	Stability
9	3	0.5	5.3425	Instability
10	3	1.0	4.9526	Stability
11	3	1.5	4.7857	Stability
12	3	2.0	4.7024	Stability
13	4	0.5	5.0501	Instability
14	4	1.0	4.4629	Stability
15	4	1.5	4.3564	Stability
16	4	2.0	4.3256	Stability