金属硅化物抗氧化涂层的研究进展

安亮, 高昌琦, 贾建刚, 马勤

Review on Metal Silicide Anti-oxidation Coatings

AN Liang, GAO Changqi, JIA Jiangang, MA Qin

图6 AIP-溅射复合镀膜系统原理图[47]

Fig.6 Schematic diagram of the hybrid coating system combining AIP and sputtering techniques[47]