磁控溅射工艺对CrN薄膜及其腐蚀行为的影响

骆鸿,高书君,肖葵,董超芳,李晓刚

Effect of Magnetron Sputtering Process Parameters on CrN Films on 304 Stainless Steel and TheirCorrosion Behavior

Hong LUO,Shujun GAO,Kui XIAO,Chaofang DONG,Xiaogang LI

表1 CrN、Cr和304不锈钢基体的部分相近峰位置

Table 1 Partially similar peak position of CrN, Cr and 304 stainless steel substrates

Phase Peak position Plan CrN 43.737 63.54 200 220 Cr 44.392 64.536 110 200 304 substrate 44.484 64.777 --- ---