磁控溅射工艺对CrN薄膜及其腐蚀行为的影响
骆鸿,高书君,肖葵,董超芳(
),李晓刚
),李晓刚
Effect of Magnetron Sputtering Process Parameters on CrN Films on 304 Stainless Steel and TheirCorrosion Behavior
LUO Hong,GAO Shujun,XIAO Kui,DONG Chaofang(),LI Xiaogang
),LI Xiaogang
图9. 镀膜后夹杂物处的形貌和元素面扫描图
Fig.9. Morphology of inclusions after sputtering (a), the magnified image of circle area in Fig.9a (b), element mapping images of Cr (c) and N (d)
