磁控溅射工艺对CrN薄膜及其腐蚀行为的影响
骆鸿,高书君,肖葵,董超芳(
),李晓刚
),李晓刚
Effect of Magnetron Sputtering Process Parameters on CrN Films on 304 Stainless Steel and TheirCorrosion Behavior
LUO Hong,GAO Shujun,XIAO Kui,DONG Chaofang(),LI Xiaogang
),LI Xiaogang
图7. 200 W溅射功率下CrN的SEM像和EDS结果
Fig.7. SEM image (a) and EDS results (b) of CrN under power level of 200 W
