磁控溅射工艺对CrN薄膜及其腐蚀行为的影响
骆鸿,高书君,肖葵,董超芳(
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LUO Hong,GAO Shujun,XIAO Kui,DONG Chaofang(),LI Xiaogang
),LI Xiaogang
图4. Cr-N二元相图[
Fig.4. Cr-N binary phase diagram[
