磁控溅射工艺对CrN薄膜及其腐蚀行为的影响
骆鸿,高书君,肖葵,董超芳(
),李晓刚
),李晓刚
Effect of Magnetron Sputtering Process Parameters on CrN Films on 304 Stainless Steel and TheirCorrosion Behavior
LUO Hong,GAO Shujun,XIAO Kui,DONG Chaofang(),LI Xiaogang
),LI Xiaogang
图3. 不同氮分压下CrN的SEM像和EDS结果
Fig.3. SEM images (a, c) and EDS results (b, d) of CrN under 60% (a, b) and 80% (c, d) nitrogen partial pressures
