磁控溅射工艺对CrN薄膜及其腐蚀行为的影响
骆鸿,高书君,肖葵,董超芳(
),李晓刚
),李晓刚
Effect of Magnetron Sputtering Process Parameters on CrN Films on 304 Stainless Steel and TheirCorrosion Behavior
LUO Hong,GAO Shujun,XIAO Kui,DONG Chaofang(),LI Xiaogang
),LI Xiaogang
图1. 不同氮分压下CrN薄膜的XRD谱
Fig.1. XRD spectra of CrN films under different nitrogen partial pressures
