直流磁控溅射非晶碳膜的导电性和耐蚀性
张海峰1,2,张栋2,李晓伟2,鲁聪达1,柯培玲2,汪爱英2(
)
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Electric Conductivity and Corrosion Resistance of Amorphous Carbon Films Prepared by Direct Current Magnetron Sputtering on 304 Stainless Steel
Haifeng ZHANG1,2,Dong ZHANG2,Xiaowei LI2,Congda LU1,Peiling KE2,Aiying WANG2,**()
)
图5. 不同偏压非晶碳膜和石墨的电阻率
Fig.5. Electrical resistivity of carbon films under different biases and graphite
