Mo含量对CrMoN复合涂层的组织结构和性能的影响

齐东丽, 雷浩, 范迪, 裴志亮, 宫骏, 孙超

EFFECT OF Mo CONTENT ON THE MICROSTRUC-TURE AND PROPERTIES OF CrMoN COMPOSITE COATINGS

QI Dongli, LEI Hao, FAN Di, PEI Zhiliang, GONG Jun, SUN Chao

表1 CrMoN复合涂层沉积参数

Table 1 Deposition conditions for CrMoN composite coatings

Sample No.	Process	Gas flow rate / (mL·min^-¹)		Cr target current / A	Mo target current / A	Substrate bias / V	Time min
Sample No.		Ar	N₂	Cr target current / A	Mo target current / A	Substrate bias / V	Time min
	Substrate cleaning	60	-	0.4	-	-200	5
	Cr adhesion layer	60	-	0.4	-	-100	5
1	CrN	30	30	0.4	-	-100	60
2	CrMoN	30	30	0.4	0.2	-100	120
3	CrMoN	30	30	0.4	0.3	-100	120
4	CrMoN	30	30	0.4	0.4	-100	120
5	CrMoN	30	30	0.3	0.4	-100	120
6	CrMoN	30	30	0.2	0.4	-100	120