采用丝束电极技术研究液滴下Cu腐蚀行为

张彭辉, 王燕华, 彭欣, 刘在健, 周媛媛, 王佳

Study of Corrosion Behavior of Copper Beneath a Droplet by Means of Wire Beam Electrode Technology

ZHANG Penghui, WANG Yanhua, PENG Xin, LIU Zaijian, ZHOU Yuanyuan, WANG Jia

表1 腐蚀不同时间电极表面各元素质量分数

Table 1 Weight persent of the elements on the wire after corrosion for different time

Time / h O Center/Edge Cu Center/Edge Cl Center/Eedge 2 h 1.27/1.34 98.73/98.66 ---/--- 6 h 5.89/7.90 93.93/92.10 0.18/--- 12 h 5.65/4.24 93.48/95.42 0.87/0.34 24 h 9.55/7.58 87.72/91.43 2.73/0.99