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| AN ELLIPSOMETRY STUDY OF THE PROPERTIES OF VERY THIN PASSIVE FILM ON 1Cr18Ni9Ti STEEL |
| Sui Sen fang Chen Hemng (Department of Engineering Physics;Tsinghua University) |
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Abstract The formation of passive film on 1Cr18Ni9Ti steel surface was studied with an ellipsometer.Some features of ellipsometer parameters(△,Ψ)of this very thin passive film(absorbing film)were studied in detail. Analytical results showed that the thickness of the passive film was about 50 and that film growth conformed to logarithmic relation.It was also found that the structure of the passive film changed with increased thickness. In fact,this film assumes a multi-film structure whose optical properties ch- ange gradually along the direction of stratification,
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Received: 25 February 1984
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[1] Vaiěek,A.,“Euipsometry in the Measurement of Surfaces and Thin Films”ed.E.Passaglia,R.R.Stromberg:and J.Kruger,NBS Misc.Publ.,256,25～40(1964)
[2] Kruger,J.,同[1] ,P131～156
[3] 隋森芳,吴秉芬,陈清明,陈鹤鸣,物理,5,273(1982)
[4] Drude,P.,Wied.Aun.53,451,(1890)
[5] #12 |
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