磁过滤电弧离子镀制备TiAlN涂层的结构与性能表征
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陈磊,裴志亮( ),肖金泉,宫骏,孙超
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Characterization of Structure and Property of TiAlN Coatings Deposited by Filtered Arc Ion Plating
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Lei CHEN,Zhiliang PEI( ),Jinquan XIAO,Jun GONG,Chao SUN
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图3. 在0.2,0.4,0.6和0.8 Pa N2分压下沉积的TiAlN涂层的Rockwell-C压痕实验结果
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Fig.3. Indentations of TiAlN coatings deposited at 0.2 Pa (a), 0.4 Pa (b), 0.6 Pa (c) and 0.8 Pa (d) N2 partial pressures after Rockwell-C test |
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