磁过滤电弧离子镀制备TiAlN涂层的结构与性能表征
陈磊,裴志亮(),肖金泉,宫骏,孙超
Characterization of Structure and Property of TiAlN Coatings Deposited by Filtered Arc Ion Plating
Lei CHEN,Zhiliang PEI(),Jinquan XIAO,Jun GONG,Chao SUN

图2. 不同N2分压下TiAlN涂层的表面形貌

Fig.2. Surface morphologies of TiAlN coatings deposited at 0.2 Pa (a), 0.4 Pa (b), 0.6 Pa (c) and 0.8 Pa (d) N2 partial pressures