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Journal of Chinese Society for Corrosion and protection  2017, Vol. 37 Issue (3): 241-246    DOI: 10.11902/1005.4537.2016.049
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Characterization of Structure and Property of TiAlN Coatings Deposited by Filtered Arc Ion Plating
Lei CHEN,Zhiliang PEI(),Jinquan XIAO,Jun GONG,Chao SUN
Institute of Metal Research, Chinese Academy of Sciences, Shenyang 110016, China
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Abstract  

TiAlN coatings were deposited on high-speed steel substrate by filtered arc ion plating technic. Effect of nitrogen partial pressure on phase structure, chemical composition, mechanical properties, deposition rate, surface roughness, adhesion and tribological properties of TiAlN coatings is studied. The results reveal that there is a strong influence of nitrogen partial pressure on coating structure and properties. By varying the nitrogen partial pressure, the maximum hardness of 34 GPa is achieved for the TiAlN coating with a strong (111) preferred orientation. The deposition rate and surface roughness of the coatings decrease gradually with increasing the nitrogen partial pressure. Due to the improved surface quality by eliminating the most of macro-particles, all the TiAlN coatings show relatively low coefficient of friction, which varies in the range of 0.15~0.33. The coatings also possess good wear resistance, showing the lowest wear rate of 8.8×10-7 mm3/(Nm).
Key words:  TiAlN coating      filtered arc ion plating      adhesion strength      mechanical property      tribological property     
Received:  11 April 2016     
Fund: Supported by Natural Science Foundation of Liaoning Province of China (2013020093)
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Lei CHEN
Zhiliang PEI
Jinquan XIAO
Jun GONG
Chao SUN

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Lei CHEN,Zhiliang PEI,Jinquan XIAO,Jun GONG,Chao SUN. Characterization of Structure and Property of TiAlN Coatings Deposited by Filtered Arc Ion Plating. Journal of Chinese Society for Corrosion and protection, 2017, 37(3): 241-246.

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https://www.jcscp.org/EN/10.11902/1005.4537.2016.049     OR     https://www.jcscp.org/EN/Y2017/V37/I3/241

Fig.1  XRD patterns of TiAlN coatings deposited at different N2 pressures
Nitrogen partial pressure / Pa Ti Al N Ti/Al ratio
0.2 44.3±2.0 15.6±0.3 40.1±2.2 2.84
0.4 38.7±0.9 10.7±0.4 50.6±1.1 3.62
0.6 35.7±0.8 11.1±0.3 53.2±1.0 3.22
0.8 34.2±0.5 12.5±0.3 53.3±0.7 2.74
Table 1  Chemical compositions and Ti/Al ratio of TiAlN coatings(atomic fraction / %)
Fig.2  Surface morphologies of TiAlN coatings deposited at 0.2 Pa (a), 0.4 Pa (b), 0.6 Pa (c) and 0.8 Pa (d) N2 partial pressures
Nitrogen partial pressure / Pa HardnessGPa Elastic modulusGPa Deposition rate
nm/min		 Roughness
Ra / nm
0.2 22.7±0.8 297.3±17.1 17.3 194.0
0.4 34.0±0.3 435.9±5.9 17.2 102.9
0.6 33.4±0.5 427.6±11.4 16.9 91.7
0.8 31.6±0.5 399.5±10.7 12.9 45.3
Table 2  Mechanical properties, deposition rate and surface roughness of TiAlN coatings
Fig.3  Indentations of TiAlN coatings deposited at 0.2 Pa (a), 0.4 Pa (b), 0.6 Pa (c) and 0.8 Pa (d) N2 partial pressures after Rockwell-C test
Nitrogen partialpressure / Pa Friction coefficient Wear rate10-6 mm3N-1m-1
0.2 0.18 1.40
0.4 0.26 3.25
0.6 0.15 0.88
0.8 0.33 1.49
Table 3  Friction coefficients and wear rates of TiAlNcoatings at different N2 partial pressures
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