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Effect of Magnetron Sputtering Process Parameters on CrN Films on 304 Stainless Steel and TheirCorrosion Behavior |
LUO Hong,GAO Shujun,XIAO Kui,DONG Chaofang(),LI Xiaogang |
National Materials Corrosion and Protection Science Data Center, Institute for Advanced Materials and Technology, University of Science and Technology Beijing, 100083 Beijing, China |
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Abstract CrN films on 304 stainless steel were prepared by magnetron sputtering. The effect of N2 partial pressure, sputtering power and inclusion quantity of the steel on the structure, composition and corrosion resistance of the prepared films was investigated by means of X-ray diffraction (XRD) and scanning electron microscopy (SEM). The results show that the increase of nitrogen partial pressure is beneficial to the increment of CrN-phase content for the CrN film, while which presents obviously the preferential orientations of the crystal planes (111) and (200) of CrN-phase. Reducing the sputtering power is beneficial to generate the increased amount of Cr to participate in the reaction with nitrogen and thus generate more CrN. The amount of inclusions on the steel surface has significant influence on the quality of films, and the inclusions sites are not conducive to the integrity of the prepared CrN films, which, correspondingly, results in significant degradation of corrosion resistance for the prepared CrN films.
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Received: 13 September 2019
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Fund: National Key Research and Development Program of China(2017YFB0702300);National Material Environment Corrosion Platform(2005DKA10400);National Natural Science Foundation of China(51671029) |
Corresponding Authors:
Chaofang DONG
E-mail: cfdong@ustb.edu.cn
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1 | HarrisM T, WhimeyG M, CrollL M. The electrodeposition of Ni-Fe-Cr alloys for magnetic thin film applications [J]. J.Electrochem. Soc., 1995, 142: 1031 | 2 | FoudaA S, EllithyA S. Inhibition effect of 4-phenylthiazole derivatives on corrosion of 304L stainless steel in HCl solution [J]. Corros. Sci., 2009, 51: 868 | 3 | HovsepianP E, LewisD B, LuoQ, et al. Corrosion resistance of CrN/NbN superlattice coatings grown by various physical vapour deposition techniques [J]. Thin Solid Films, 2005, 488: 1 | 4 | VyasA, ShenY G, ZhouZ F, et al. Nano-structured CrN/CNx multilayer films deposited by magnetron sputtering [J]. Compos.Sci. Technol., 2008, 68: 2922 | 5 | HuangM D, LiuY, MengF Y, et al. Thick CrN/TiN multilayers deposited by arc ion plating [J]. Vacuum, 2013, 89: 101 | 6 | ChengY H, BrowneT, HeckermanB. Mechanical and tribological properties of CrN coatings deposited by large area filtered cathodic arc [J]. Wear, 2011, 271: 775 | 7 | WangD Y, WengK W. Microstructure analyses of CrN coating synthesized by a hybrid PVD and metal-plasma ion implantation process [J]. Surf. Coat. Technol., 2002, 156: 195 | 8 | LinJ L, ZhangN Y, SproulW D, et al. A comparison of the oxidation behavior of CrN films deposited using continuous DC, pulsed DC and modulated pulsed power magnetron sputtering [J]. Surf.Coat. Technol., 2012, 206: 3283 | 9 | LeeJ W, TienS K, KuoY C. The effects of pulse frequency and substrate bias to the mechanicalproperties of CrN coatings deposited by pulsed DC magnetron sputtering [J].Thin Solid Films, 2006, 494: 161 | 10 | ShiY J, LongS Y, FangL,et al. Effects of N2 content and thickness on CrNx coatings on Mg alloy by the planar DC reactive magnetron sputtering [J]. Appl. Surf. Sci., 2009, 255: 6515 | 11 | KongQ H, JiL, LiH X, et al. Composition, microstructure, and properties of CrNx films deposited using medium frequency magnetron sputtering [J]. Appl. Surf. Sci., 2011, 257: 2269 | 12 | McHaleA E, ed., Phase Equilibria Diagrams, Borides Carbides and Nitrides, vol.X [M]. Westerville: The American Ceramic Society, 1994: 415 | 13 | Navin?ekB, PanjanP. Oxidation of CrNx hard coatings reactively sputtered at low temperature [J]. Thin Solid Film, 1993, 223: 4 | 14 | Herrera-TrejoM, CastroM R, MendezJ N, et al. Evolution of inclusion nature during the EAF-LF-CC process [J]. Scand. J. Metall., 1998, 27: 233 | 15 | MapelliC, NolliP. Formation mechanism of non-metallic inclusions in different stainless steel grades [J]. ISIJ Int., 2003, 43: 1191 | 16 | LoweJ H, MitchellA. Zero inclusion steels [A]. | 16 | NuttingJ, ViswanathanR, eds. Clean Steel: Superclean Steel [M]. London: Institute of Materials, 1995: 223 |
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