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Characterization of Structure and Property of TiAlN Coatings Deposited by Filtered Arc Ion Plating |
Lei CHEN,Zhiliang PEI(),Jinquan XIAO,Jun GONG,Chao SUN |
Institute of Metal Research, Chinese Academy of Sciences, Shenyang 110016, China |
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Abstract TiAlN coatings were deposited on high-speed steel substrate by filtered arc ion plating technic. Effect of nitrogen partial pressure on phase structure, chemical composition, mechanical properties, deposition rate, surface roughness, adhesion and tribological properties of TiAlN coatings is studied. The results reveal that there is a strong influence of nitrogen partial pressure on coating structure and properties. By varying the nitrogen partial pressure, the maximum hardness of 34 GPa is achieved for the TiAlN coating with a strong (111) preferred orientation. The deposition rate and surface roughness of the coatings decrease gradually with increasing the nitrogen partial pressure. Due to the improved surface quality by eliminating the most of macro-particles, all the TiAlN coatings show relatively low coefficient of friction, which varies in the range of 0.15~0.33. The coatings also possess good wear resistance, showing the lowest wear rate of 8.8×10-7 mm3/(Nm).
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Received: 11 April 2016
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Fund: Supported by Natural Science Foundation of Liaoning Province of China (2013020093) |
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