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中国腐蚀与防护学报  1994, Vol. 14 Issue (3): 247-251    
  研究报告 本期目录 | 过刊浏览 |
Ti-N扩散障碍膜的组织结构及高温热稳定性
王家军;孙榆芳;叶锐曾
清华大学材料系;北京有色金属研究总院表面技术中心;北京科技大学材料系
THE STRUCTURE AND HIGH TEMPERATURE STABILITY OF Ti-N FILM AS A DIFFUSION BARRIER
Wang Jiajun(Tsinghua University)Sun Yufang(Central Non-Reffous Research Institute)Ye Ruizeng(University of Science and Technology Beijing)
全文: PDF(1850 KB)  
摘要: 研究了多弧离子镀Ti-N扩散障碍膜的表面形貌、组织结构及高温热稳定性.发现Ti-N膜表面存在大量颗粒物;颗粒物对Ti-N膜外磁控溅射涂覆的MCrAIX包覆型涂层的组织形态及性能有较大影响.X射线分析表明:Ti-N镀膜由δ-TiN、ε-TiDN、α-Ti等多相组成;δ-TiN呈明显{111}择优取向,但经扩散退火处理后,择优取向消失.1000℃热时效试验结果表明Ti-N膜的高温热稳定性良好,与基体及相邻MCrAIX镀层间不发生显著互扩散,因而可作为扩散障碍层用于抑止或减缓合金元素在GH220基体及MCrAlX涂层间的互扩散.
关键词 Ti-N镀膜择优取向热稳定性    
Abstract:The surface morphology, structure and high temperature stability of multi-arc plated Ti-N film as a diffusion barrier on nickel-based alloy GH220 have been studied. A lot of palticales which are found on surface of the Ti-N film have great influence on the structure and properties of the magnetic-controlled sputtered MCrAIX coating overlaying the Ti-N film. X-ray diffraction analysis indicates that the Ti-N film consists of δ-TiN, ε-Ti2N, α-Ti, etc. The δ-TiN in the Ti-N film has a strongly preferred {111} orientation, but the preference disappears after the film is diffusion-annealed. Experimental results of aging at 1000℃ demonstrate that the Ti-N film is of good high temperature stability, and the elemental Ti in Ti-N film does not inter-diffuse towards either GH220 alloy or MCrAIX coating. Thus it could be concluded that Ti-N film can be used as a diffusion barrier to prevent the alloying elements from inter-diffusion or slow down the rate of inter-diffusion of alloying elements between the substrate and MCrAIX coating.
Key words Multi-arc plated Ti-N film    Preferred orientation    High temperature stability
收稿日期: 1994-06-25     

引用本文:

王家军;孙榆芳;叶锐曾. Ti-N扩散障碍膜的组织结构及高温热稳定性[J]. 中国腐蚀与防护学报, 1994, 14(3): 247-251.
. THE STRUCTURE AND HIGH TEMPERATURE STABILITY OF Ti-N FILM AS A DIFFUSION BARRIER. J Chin Soc Corr Pro, 1994, 14(3): 247-251.

链接本文:

https://www.jcscp.org/CN/      或      https://www.jcscp.org/CN/Y1994/V14/I3/247

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