磁控溅射工艺对CrN薄膜及其腐蚀行为的影响

doi:10.11902/1005.4537.2019.156

中国腐蚀与防护学报

2019, Vol. 39

Issue (5): 423-430 DOI: 10.11902/1005.4537.2019.156

研究报告

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磁控溅射工艺对CrN薄膜及其腐蚀行为的影响

骆鸿,高书君,肖葵,董超芳(

),李晓刚

北京科技大学新材料技术研究院国家材料腐蚀与防护科学数据中心北京 100083

Effect of Magnetron Sputtering Process Parameters on CrN Films on 304 Stainless Steel and TheirCorrosion Behavior

LUO Hong,GAO Shujun,XIAO Kui,DONG Chaofang(

),LI Xiaogang

National Materials Corrosion and Protection Science Data Center, Institute for Advanced Materials and Technology, University of Science and Technology Beijing, 100083 Beijing, China

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摘要:

通过磁控溅射技术制备了CrN薄膜，使用X射线衍射 (XRD)、扫描电镜 (SEM) 等方法研究了N₂分压、溅射功率以及夹杂物数量对CrN薄膜结构、成分、耐蚀性能的影响。结果表明，提高N₂分压能增加CrN相的含量，且CrN基体有明显的 (111) 和 (200) 面取向；降低溅射功率有利于使更多的Cr参与反应，生成更多的CrN。此外，夹杂物数量对薄膜质量有重大影响，夹杂物处不易镀上膜导致其耐蚀性明显下降。

关键词 ： 304不锈钢, 磁控溅射, 镀膜, 腐蚀

Abstract：

CrN films on 304 stainless steel were prepared by magnetron sputtering. The effect of N₂ partial pressure, sputtering power and inclusion quantity of the steel on the structure, composition and corrosion resistance of the prepared films was investigated by means of X-ray diffraction (XRD) and scanning electron microscopy (SEM). The results show that the increase of nitrogen partial pressure is beneficial to the increment of CrN-phase content for the CrN film, while which presents obviously the preferential orientations of the crystal planes (111) and (200) of CrN-phase. Reducing the sputtering power is beneficial to generate the increased amount of Cr to participate in the reaction with nitrogen and thus generate more CrN. The amount of inclusions on the steel surface has significant influence on the quality of films, and the inclusions sites are not conducive to the integrity of the prepared CrN films, which, correspondingly, results in significant degradation of corrosion resistance for the prepared CrN films.

Key words： 304 stainless steel magnetron sputtering plating corrosion

收稿日期: 2019-09-13

ZTFLH:

TG172

基金资助:国家重点研发专项(2017YFB0702300);国家材料环境腐蚀平台(2005DKA10400);国家自然科学基金(51671029)

通讯作者: 董超芳 E-mail: cfdong@ustb.edu.cn

Corresponding author: Chaofang DONG E-mail: cfdong@ustb.edu.cn

作者简介: 骆鸿，男，1980年生，博士，教授

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引用本文:

骆鸿,高书君,肖葵,董超芳,李晓刚. 磁控溅射工艺对CrN薄膜及其腐蚀行为的影响[J]. 中国腐蚀与防护学报, 2019, 39(5): 423-430.
Hong LUO, Shujun GAO, Kui XIAO, Chaofang DONG, Xiaogang LI. Effect of Magnetron Sputtering Process Parameters on CrN Films on 304 Stainless Steel and TheirCorrosion Behavior. Journal of Chinese Society for Corrosion and protection, 2019, 39(5): 423-430.

链接本文:

https://www.jcscp.org/CN/10.11902/1005.4537.2019.156 或 https://www.jcscp.org/CN/Y2019/V39/I5/423

图1 不同氮分压下CrN薄膜的XRD谱

表1 CrN、Cr和304不锈钢基体的部分相近峰位置

图2 不同氮分压下XRD的分峰结果

图3 不同氮分压下CrN的SEM像和EDS结果

图4 Cr-N二元相图[12]

图5 不同功率下CrN薄膜的XRD谱

图6 不同功率下XRD的分峰结果

图7 200 W溅射功率下CrN的SEM像和EDS结果

图8 304不锈钢的夹杂物形貌和成分

图9 镀膜后夹杂物处的形貌和元素面扫描图

图10 3种不同夹杂物含量的304不锈钢样品形貌及镀膜后在3.5%NaCl溶液中的极化曲线

1	HarrisM T, WhimeyG M, CrollL M. The electrodeposition of Ni-Fe-Cr alloys for magnetic thin film applications [J]. J.Electrochem. Soc., 1995, 142: 1031
2	FoudaA S, EllithyA S. Inhibition effect of 4-phenylthiazole derivatives on corrosion of 304L stainless steel in HCl solution [J]. Corros. Sci., 2009, 51: 868
3	HovsepianP E, LewisD B, LuoQ, et al. Corrosion resistance of CrN/NbN superlattice coatings grown by various physical vapour deposition techniques [J]. Thin Solid Films, 2005, 488: 1
4	VyasA, ShenY G, ZhouZ F, et al. Nano-structured CrN/CNx multilayer films deposited by magnetron sputtering [J]. Compos.Sci. Technol., 2008, 68: 2922
5	HuangM D, LiuY, MengF Y, et al. Thick CrN/TiN multilayers deposited by arc ion plating [J]. Vacuum, 2013, 89: 101
6	ChengY H, BrowneT, HeckermanB. Mechanical and tribological properties of CrN coatings deposited by large area filtered cathodic arc [J]. Wear, 2011, 271: 775
7	WangD Y, WengK W. Microstructure analyses of CrN coating synthesized by a hybrid PVD and metal-plasma ion implantation process [J]. Surf. Coat. Technol., 2002, 156: 195
8	LinJ L, ZhangN Y, SproulW D, et al. A comparison of the oxidation behavior of CrN films deposited using continuous DC, pulsed DC and modulated pulsed power magnetron sputtering [J]. Surf.Coat. Technol., 2012, 206: 3283
9	LeeJ W, TienS K, KuoY C. The effects of pulse frequency and substrate bias to the mechanicalproperties of CrN coatings deposited by pulsed DC magnetron sputtering [J].Thin Solid Films, 2006, 494: 161
10	ShiY J, LongS Y, FangL,et al. Effects of N2 content and thickness on CrNx coatings on Mg alloy by the planar DC reactive magnetron sputtering [J]. Appl. Surf. Sci., 2009, 255: 6515
11	KongQ H, JiL, LiH X, et al. Composition, microstructure, and properties of CrNx films deposited using medium frequency magnetron sputtering [J]. Appl. Surf. Sci., 2011, 257: 2269
12	McHaleA E, ed., Phase Equilibria Diagrams, Borides Carbides and Nitrides, vol.X [M]. Westerville: The American Ceramic Society, 1994: 415
13	Navin?ekB, PanjanP. Oxidation of CrNx hard coatings reactively sputtered at low temperature [J]. Thin Solid Film, 1993, 223: 4
14	Herrera-TrejoM, CastroM R, MendezJ N, et al. Evolution of inclusion nature during the EAF-LF-CC process [J]. Scand. J. Metall., 1998, 27: 233
15	MapelliC, NolliP. Formation mechanism of non-metallic inclusions in different stainless steel grades [J]. ISIJ Int., 2003, 43: 1191
16	LoweJ H, MitchellA. Zero inclusion steels [A].
16	NuttingJ, ViswanathanR, eds. Clean Steel: Superclean Steel [M]. London: Institute of Materials, 1995: 223

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