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中国腐蚀与防护学报  2017, Vol. 37 Issue (3): 241-246    DOI: 10.11902/1005.4537.2016.049
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磁过滤电弧离子镀制备TiAlN涂层的结构与性能表征
陈磊,裴志亮(),肖金泉,宫骏,孙超
中国科学院金属研究所 沈阳 110016
Characterization of Structure and Property of TiAlN Coatings Deposited by Filtered Arc Ion Plating
Lei CHEN,Zhiliang PEI(),Jinquan XIAO,Jun GONG,Chao SUN
Institute of Metal Research, Chinese Academy of Sciences, Shenyang 110016, China
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摘要 

采用磁过滤电弧离子镀技术在高速钢基体上沉积TiAlN涂层。研究了N2分压对TiAlN涂层的相结构、化学成分、力学性能、沉积速率、表面粗糙度、结合强度以及摩擦磨损性能的影响。结果表明,N2分压的变化对涂层的结构与性能影响显著。随着N2分压的增加,TiAlN涂层呈现 (111) 择优取向,其硬度最高可达34 GPa。涂层的沉积速率和表面粗糙度随着N2分压的增大而逐渐降低。此外,由于大颗粒的去除使得涂层表面质量得到提升,所制备的TiAlN涂层均具有较低的摩擦系数 (0.15~0.33),并且呈现良好的抗磨损性能,其最低磨损率为8.8×10-7 mm3/(Nm)。

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陈磊
裴志亮
肖金泉
宫骏
孙超
关键词:  TiAlN涂层  磁过滤电弧离子镀  结合强度  力学性能  摩擦磨损性能    
Abstract: 

TiAlN coatings were deposited on high-speed steel substrate by filtered arc ion plating technic. Effect of nitrogen partial pressure on phase structure, chemical composition, mechanical properties, deposition rate, surface roughness, adhesion and tribological properties of TiAlN coatings is studied. The results reveal that there is a strong influence of nitrogen partial pressure on coating structure and properties. By varying the nitrogen partial pressure, the maximum hardness of 34 GPa is achieved for the TiAlN coating with a strong (111) preferred orientation. The deposition rate and surface roughness of the coatings decrease gradually with increasing the nitrogen partial pressure. Due to the improved surface quality by eliminating the most of macro-particles, all the TiAlN coatings show relatively low coefficient of friction, which varies in the range of 0.15~0.33. The coatings also possess good wear resistance, showing the lowest wear rate of 8.8×10-7 mm3/(Nm).

Key words:  TiAlN coating    filtered arc ion plating    adhesion strength    mechanical property    tribological property
收稿日期:  2016-04-11                出版日期:  2017-07-04      发布日期:  2017-07-04      期的出版日期:  2017-07-04
基金资助: 辽宁省自然科学基金 (2013020093)
引用本文:    
陈磊,裴志亮,肖金泉,宫骏,孙超. 磁过滤电弧离子镀制备TiAlN涂层的结构与性能表征[J]. 中国腐蚀与防护学报, 2017, 37(3): 241-246.
Lei CHEN,Zhiliang PEI,Jinquan XIAO,Jun GONG,Chao SUN. Characterization of Structure and Property of TiAlN Coatings Deposited by Filtered Arc Ion Plating. Journal of Chinese Society for Corrosion and protection, 2017, 37(3): 241-246.
链接本文:  
http://www.jcscp.org/CN/10.11902/1005.4537.2016.049  或          http://www.jcscp.org/CN/Y2017/V37/I3/241
图1  不同N2分压条件下沉积的TiAlN涂层的XRD谱
Nitrogen partial pressure / Pa Ti Al N Ti/Al ratio
0.2 44.3±2.0 15.6±0.3 40.1±2.2 2.84
0.4 38.7±0.9 10.7±0.4 50.6±1.1 3.62
0.6 35.7±0.8 11.1±0.3 53.2±1.0 3.22
0.8 34.2±0.5 12.5±0.3 53.3±0.7 2.74
表1  TiAlN涂层的化学成分与Ti/Al比
图2  不同N2分压下TiAlN涂层的表面形貌
Nitrogen partial pressure / Pa HardnessGPa Elastic modulusGPa Deposition rate
nm/min
Roughness
Ra / nm
0.2 22.7±0.8 297.3±17.1 17.3 194.0
0.4 34.0±0.3 435.9±5.9 17.2 102.9
0.6 33.4±0.5 427.6±11.4 16.9 91.7
0.8 31.6±0.5 399.5±10.7 12.9 45.3
表2  TiAlN涂层的力学性能,沉积速率与表面粗糙度
图3  在0.2,0.4,0.6和0.8 Pa N2分压下沉积的TiAlN涂层的Rockwell-C压痕实验结果
Nitrogen partialpressure / Pa Friction coefficient Wear rate10-6 mm3N-1m-1
0.2 0.18 1.40
0.4 0.26 3.25
0.6 0.15 0.88
0.8 0.33 1.49
表3  TiAlN涂层的摩擦系数与磨损率
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