膜电解法再生FeCl<SUB>3</SUB>蚀刻液的蚀刻性能研究

doi:10.11902/1005.4537.2013.100

中国腐蚀与防护学报

2014, Vol. 34

Issue (2): 195-198 DOI: 10.11902/1005.4537.2013.100

研究报告

本期目录 | 过刊浏览

膜电解法再生FeCl₃蚀刻液的蚀刻性能研究

保积庆¹,², 沈筱芳², 徐劼¹, 俞恬¹

1. 嘉兴学院生物与化学工程学院嘉兴 314001;
2. 常州大学环境与安全工程学院常州 213100

Performance of FeCl₃ Etching Solution Renewed by Ion-exchange Membrane Electrolysis

BAO Jiqing¹, ², SHEN Xiaofang², XU Jie¹, YU Tian¹

1. School of Biological and Chemical Engineering, Jiaxing University, Jiaxing 314001, China;
2. School of Environmental and Safety Engineering, Changzhou University, Changzhou 213100, China

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摘要:

对某蚀刻厂的废蚀刻液通过膜电解工艺进行再生，并通过蚀刻性能条件实验研究了蚀刻时间、温度、蚀刻液浓度、蚀刻液游离酸含量等因素对蚀刻液 (新蚀刻液、在线蚀刻液、再生蚀刻液) 氧化还原电位和蚀刻速率的影响。结果表明，再生蚀刻液满足蚀刻要求，并且当蚀刻温度为50~60 ℃、蚀刻液浓度为再生蚀刻液浓度的90%、游离酸浓度为0.3 mol/L以上时，再生蚀刻液蚀刻速率最大。

关键词 ：再生蚀刻液, 膜电解, 蚀刻速率

Abstract：In order to recycle the etching solution, the waste FeCl₃etching solution of a plant was renewed by a process of ion-exchange membrane electrolysis. Then the performance of the renewed etching solution was evaluated in terms of the effect of etching time, temperature, concentration of the etching solution and the free acid content in the etching solution on the redox potential and the etching rate for etching solutions such as new etching solution, the online etching solution and renewed etching solution. The results showed that the renewed etching solution met the demands of the etching process. An optimal etching efficiency may be reached when the etchant contains 90% of the renewed etching solution and free acid concentration higher than 0.3 mol/L at etching temperatures within a range 50~60 ℃.

Key words： regenerated etching solution membrane electrolysis etching rate

收稿日期: 2013-06-14

ZTFLH:

X781.1

基金资助:浙江省公益技术研究工业项目 (2011C31042)和嘉兴市科技计划项目 (2013BY15005)资助

通讯作者: baojiqing997441@sina.com

作者简介: 保积庆，男，1966年生，副研究员，博士，研究方向为资源循环技术

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引用本文:

保积庆, 沈筱芳, 徐劼, 俞恬. 膜电解法再生FeCl₃蚀刻液的蚀刻性能研究[J]. 中国腐蚀与防护学报, 2014, 34(2): 195-198.
BAO Jiqing, SHEN Xiaofang, XU Jie, YU Tian. Performance of FeCl₃ Etching Solution Renewed by Ion-exchange Membrane Electrolysis. Journal of Chinese Society for Corrosion and protection, 2014, 34(2): 195-198.

链接本文:

https://www.jcscp.org/CN/10.11902/1005.4537.2013.100 或 https://www.jcscp.org/CN/Y2014/V34/I2/195

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